Langmuir probe measurements in an inductively coupled plasma source
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چکیده
منابع مشابه
A Langmuir probe system incorporating the Boyd - Twiddy method for EEDF measurement applied to an inductively coupled plasma source
This paper reports on a modern implementation of a Langmuir probe method that was first proposed in the 1950’s. The system directly measures the first and second derivative of the I-V characteristic and determines the EEDF. This probe offers many advantages over existing systems that rely on numerical differentiating and data smoothing techniques. In addition to the EEDF analysis the system als...
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ژورنال
عنوان ژورنال: Physical Review E
سال: 1997
ISSN: 1063-651X,1095-3787
DOI: 10.1103/physreve.55.3450